Welcome!
EO Technical Solutions is the Semiconductor Industry’s #1 Second Source for ASML parts repair and rebuild services and is now a part of ASML. With over 80 years of combined lithography equipment and engineering experience on both the supplier side and in the fabs, no one is more trusted than our team at EO Technical Solutions for your lithography needs. See our parts inventory at https://www.eotechnical.com/shop.
EO Technical Solutions was acquired by ASML in July 2023 to continue the long-standing work which was created in 2010 and fully accepted and adopted by the market place.
Parts
EOTS is the leader in second source parts for the ASML PAS5500, PAS5000, & PAS2500 Series equipment. The three transaction types that we offer are Repair, Exchange, and Sale. Click here to learn more..
View our available OEM Spares.
Service & Training
With 80 years of combined ASML experience, four full time sr. equipment engineers perform a variety of Services. Full service contracts, tool installation & deinstallation, as-need service & quarterly PM’s are among the most common. In 2016 alone, 650 hours were logged at customer sites worldwide. Learn more.
Equipment
Working directly through ASML, EOTS’s specialized capabilities in the PAS5500 Market has made us a go-to choice for buying and selling ASML equipment. EOTS has gained a strong reputation for innovative support solutions.
Please contact your local ASML office or email media@eotechnical.com.
EOTS Main Office, USA
EO Technical Solutions, LLC
11304 NE 66th St
Suite 102
Vancouver, WA 98662; USA
Contact Info: (General Sales Inquiries)
Phone: 360-828-7630
Email: Media@eotechnical.com
Press Inquiries: Media@eotechnical.com