Service and Training

EOTS will continue to support ASML 2500 au9nd 5000 model systems on a best effort basis with no guarantees of response time or uptimes.

With 80 years of combined ASML experience, four full time Sr. Equipment Engineers perform a variety of Services. Full service contracts, tool installation & deinstallation, as-needed service & quarterly PM’s are among the most common. Equipment Deinstall / Installs are performed in accordance with OEM procedure and industry best practices. PM’s are available on an as-needed basis or as part of a full service contract.

Customized training is also available at the EOTS facility. Dedicated ASML steppers and scanners are used for a practical learning, in addition to theoretical concepts taught in the classroom. Class sizes are kept small with 2-3 trainees per 5 day session.

ASML 5500 service requests should be directed to the regional offices of ASML for inquires and quotes.
Please contact your local ASML office or email media@eotechnical.com.